4. Data processing: measuring, calibrating, or testing
  5. Measurement system
  6. Performance or efficiency evaluation

Jae-Sun Cho

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Apparatus and method for inspecting patterns on wafers

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate

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Method and apparatus for classifying repetitive defects on a...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2982427

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