Method and apparatus for arranging recipe of scanning...

Details Method and apparatus for arranging recipe of scanning... Method and apparatus for arranging recipe of scanning...

2008-04-29

2008-04-29

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C324S754120

Reexamination Certificate

active

07365322

ABSTRACT:
In order to provide an imaging-recipe arranging or creating apparatus and method adapted so that selection rules for automatic arrangement of an imaging recipe can be optimized by teaching in a SEM apparatus or the like, the imaging-recipe arranging or creating apparatus in this invention that arranges an imaging recipe for SEM-observing a semiconductor pattern using a scanning electron microscope includes a database that receives and stores layout information of the above semiconductor pattern in a low-magnification field, and an imaging-recipe arranging unit which, on the basis of the database-stored semiconductor pattern layout information, arranges the imaging recipe automatically in accordance with the automatic arrangement algorithm that includes teaching-optimized selection rules for selecting an imaging point(s).

REFERENCES:
patent: 2007/0045536 (2007-03-01), Nakasuji et al.
patent: 2000-348658 (2000-12-01), None
patent: 2002-328015 (2002-11-01), None

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