Method and apparatus for analyzing the internal chemistry and co

Details Method and apparatus for analyzing the internal chemistry and co Method and apparatus for analyzing the internal chemistry and co

1985-04-30

1989-10-17

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250310, 250307, 250288, H01J 37252, G01N 23225

Patent

active

048749460

ABSTRACT:
A method and apparatus is disclosed for obtaining and mapping chemical compositional data for solid devices. It includes a SIMS mass analyzer or similar system capable of being rastered over a surface of the solid to sample the material at a pattern of selected points, as the surface is being eroded away by sputtering or a similar process. The data for each point sampled in a volume of the solid is digitally processed and indexed by element or molecule type, exact spacial location within the volume, and the concentration levels of the detected element or molecule types. This data can then be recalled and displayed for any desired planar view in the volume.

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