Method and apparatus for aligning and tensioning a pad/belt used

Details Method and apparatus for aligning and tensioning a pad/belt used Method and apparatus for aligning and tensioning a pad/belt used

1997-02-06

1999-02-16

Rose, Robert A.

Abrading

Precision device or process - or with condition responsive...

Computer controlled

451 41, 451311, 451499, 451289, B24B 2120

Patent

active

058713905

ABSTRACT:
The present invention describes an apparatus and method for aligning a pad/belt on a roller for use in chemical mechanical polishing using linear planarization. The present invention comprises an alignment sensor that senses the alignment of the pad/belt. The present invention additionally comprises a tensioner that tensions the pad/belt on the roller. And, a controller that controls the alignment of the pad/belt on the roller by controlling the tensioner.

REFERENCES:
patent: 3504458 (1970-04-01), Rutt
patent: 3552067 (1971-01-01), Przgocki
patent: 3745717 (1973-07-01), Robinson
patent: 4187645 (1980-02-01), Lind
patent: 4290240 (1981-09-01), Robinson
patent: 4337598 (1982-07-01), Barth et al.
patent: 4369601 (1983-01-01), Gerber
patent: 5184424 (1993-02-01), Miller
patent: 5692947 (1997-12-01), Talieh et al.

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