4. Abrading
  5. Precision device or process - or with condition responsive...
  6. Computer controlled

Leon Volfovski

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Apparatus and methods for handling a substrate

Handling: hand and hoist-line implements – Utilizing fluid pressure – Venturi effect
Reexamination Certificate

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Cluster tool architecture for processing a substrate

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Cluster tool architecture for processing a substrate

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Reexamination Certificate

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Method and apparatus for aligning and tensioning a pad/belt used

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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Wafer edge cleaning

Brushing – scrubbing – and general cleaning – Machines – Brushing
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Profile ID: LFUS-PAI-P-1820878

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