Metal precursors for low temperature deposition and methods...

Details Metal precursors for low temperature deposition and methods... Metal precursors for low temperature deposition and methods...

2011-01-11

2011-01-11

Maldonado, Julio J (Department: 2823)

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

C438S102000, C438S237000, C438S198000, C438S381000, C257SE21335, C257SE21340, C257SE21459, C257SE21463

Reexamination Certificate

active

07867880

ABSTRACT:
The present invention provides metal precursors for low temperature deposition. The metal precursors include a metal ring compound including at least one metal as one of a plurality of elements forming a ring. Methods of forming a metal thin layer and manufacturing a phase change memory device including use of the metal precursors is also provided.

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