Metal plug capacitor structures for integrated circuit devices a

Details Metal plug capacitor structures for integrated circuit devices a Metal plug capacitor structures for integrated circuit devices a

1996-11-06

1998-05-05

Nelms, David C.

Static information storage and retrieval

Systems using particular element

Capacitors

257296, 257306, G11C 1124, H01L 27108

Patent

active

057485216

ABSTRACT:
A capacitor structure includes a substrate and an insulating layer on the substrate. The insulating layer has a contact hole therethrough extending from a surface of the substrate to a surface of the insulating layer opposite the substrate. A metal plug is provided in the contact hole, and a storage electrode is provided on the insulating layer in electrical contact with the metal plug. Accordingly, the storage electrode is electrically connected to the substrate through the metal plug. In particular, the metal plug preferably comprises a metal such as tungsten having a high melting point. Related methods are also disclosed.

REFERENCES:
patent: 5359217 (1994-10-01), Murai
patent: 5432732 (1995-07-01), Ohmi
patent: 5438541 (1995-08-01), Ando

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