Metal oxide semiconductor field effect transistor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257213, 257288, 257309, H01L 2976, H01L 2994, H01L 31062, H01L 31113

Patent

active

056104243

ABSTRACT:
A metal oxide semiconductor field effect transistor having an increased channel length in a limited area of a highly integrated chip where a gate electrode is formed, and a method for fabricating the transistor. The transistor includes a semiconductor substrate having a protruded structure at a predetermined portion thereof, a gate oxide film surrounding the protruded structure of the semiconductor substrate, a polysilicon layer pattern for a gate electrode, the polysilicon layer pattern disposed over the gate oxide film, lightly doped drain regions formed in the semiconductor substrate respectively at opposite edges of the polysilicon layer pattern, and source and drain regions formed outward of the lightly doped drain regions in the semiconductor substrate respectively.

REFERENCES:
patent: 5089432 (1992-02-01), Yoo
patent: 5177027 (1993-01-01), Lowrey et al.
patent: 5262337 (1993-11-01), Kim
patent: 5403763 (1995-04-01), Yamazaki
patent: 5407848 (1995-04-01), Park et al.
patent: 5418398 (1995-05-01), Sardella et al.

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