Metal-over-metal devices and the method for manufacturing same

Details Metal-over-metal devices and the method for manufacturing same Metal-over-metal devices and the method for manufacturing same

Filed on

2005-09-27

Date issued

2005-09-27

Examiner

Pham, Hoai (Department: 2814)

Patent Class

Active solid-state devices (e.g., transistors, solid-state diode

SubClass

Field effect device

SubSubClass

Having insulated electrode

Other Related Categories

C257S307000

Type

Reexamination Certificate

Status

active

Patent number

06949781

Description

ABSTRACT:
A metal-over-metal (MOM) device and the method for manufacturing same is provided. The device has at least one device cell on a first layer comprising a frame piece and a center piece surrounded by the frame piece. The center piece has a cross-shape center portion defining four quadrants of space between the frame and center pieces. The center piece has one or more center fingers each extending from at least one of the four ends thereof within a quadrant. The frame piece also has one or more frame fingers extending therefrom, each being in at least one quadrant and not being overlapped with the center finger in the same quadrant.

REFERENCES:
patent: 5208725 (1993-05-01), Akcasu
patent: 5583359 (1996-12-01), Ng et al.
patent: 6383858 (2002-05-01), Gupta et al.
patent: 2002/0093780 (2002-07-01), Hajimiri et al.

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