Metal-insulator-metal capacitor and method of manufacturing...

Details Metal-insulator-metal capacitor and method of manufacturing... Metal-insulator-metal capacitor and method of manufacturing...

2006-08-24

2009-12-15

Hoang, Quoc D (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257SE27048, C257SE29343, C257SE29345

Reexamination Certificate

active

07633112

ABSTRACT:
A metal-insulator-metal capacitor includes a first electrode in a first wiring level, a second electrode above the first wiring level and extending into a first portion of the first electrode that surrounds the second electrode, and a dielectric film separating the first electrode from the second electrode.

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patent: 6620701 (2003-09-01), Ning
patent: 6638830 (2003-10-01), Tsai et al.
patent: 7186625 (2007-03-01), Chudzik et al.
patent: 2005/0282348 (2005-12-01), Lee
patent: 1020020001375 (2002-01-01), None

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