MEMS tunable capacitor based on angular vertical comb drives

Electricity: electrical systems and devices – Electrostatic capacitors – Variable

Reexamination Certificate

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Details

C361S272000, C361S278000, C361S287000, C361S290000, C361S292000, C333S134000, C333S135000, C333S174000

Reexamination Certificate

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07085122

ABSTRACT:
A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.

REFERENCES:
patent: 5636099 (1997-06-01), Sugawara et al.
patent: 5640133 (1997-06-01), MacDonald et al.
patent: 5901031 (1999-05-01), Ishige et al.
patent: 6683513 (2004-01-01), Shamsaifar et al.
patent: 6690568 (2004-02-01), Johnson

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