4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal

Nobuhisa Yamashita

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MEMS sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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MEMS sensor and production method of MEMS sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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MEMS sensor and production method of MEMS sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2188720

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