Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
Inventor
active
Fabrication of single-crystal silicon structures using sacrifici
MEMS having a three-wafer structure
MEMS mirror and method of fabrication
MEMS optical switch actuator
Passive pressure regulator for setting the pressure of a liquid
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Profile ID: LFUS-PAI-P-212249