Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2008-07-30
2011-10-25
Vu, Hung (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S302000
Reexamination Certificate
active
08044449
ABSTRACT:
A memory device is provided. The memory device includes a substrate, a trench having an upper portion and a lower portion formed in the substrate, a trench capacitor formed in the lower portion of the trench, a collar dielectric layer formed on a sidewall of the trench capacitor and extending away from a top surface of the substrate, a first doping region formed on a side of the upper portion of the trench in the substrate for serving as source/drain, a conductive layer formed in the trench and electrically connected to the first doping region, a top dielectric layer formed on conductive layer, a gate formed on the top dielectric layer, an epitaxy layer formed on both sides of the gate and on the substrate and a second doping area formed on a top of the epitaxy layer for serving as source/drain.
REFERENCES:
patent: 5879998 (1999-03-01), Krivokapic
patent: 6838866 (2005-01-01), Tsai et al.
patent: 2004/0256665 (2004-12-01), Birner et al.
Chen Meng-Hung
Lee Chung-Yuan
Lee Pei-Ing
Liao Hung-Chang
Lin Shian-Jyh
Nanya Technology Corporation
Vu Hung
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