Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent
1997-06-30
1999-11-02
Crane, Sara
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
438265, H01L 21266
Patent
active
059769327
ABSTRACT:
A memory cell and a method for producing the memory cell have a plurality of structured layers disposed on a semiconducting base body and an exactly defined overlap region of a first doped region and a floating gate layer. A control gate layer is disposed approximately without any overlap over the first doped region. The memory cell can be programmed with the aid of the Fowler-Nordheim tunnel effect.
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Crane Sara
Greenberg Laurence A.
Lerner Herbert L.
Siemens Aktiengesellschaft
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