Megasonic substrate processing module

Details Megasonic substrate processing module Megasonic substrate processing module

2005-03-15

2005-03-15

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With spray or jet supplying and/or applying means

C134S186000, C134S137000, C134S140000, C134S143000, C134S902000

Reexamination Certificate

active

06866051

ABSTRACT:
A megasonic module for substrate processing is provided. Embodiments of the present invention include a tank configured to hold processing fluids in which the substrate is submerged, and a lid configured to mate with and seal the tank. At least two megasonic transducers are positioned within the megasonic module to direct megasonic energy to each of an active surface and a backside surface of the substrate. A pair of drive wheels are configured to receive an edge of the substrate to support and rotate the substrate in a horizontal orientation between the at least two megasonic transducers. The substrate is supported against the pair of drive wheels by a substrate stabilizing arm/wheel which also allows the rotation of the substrate. A drive motor is configured to rotate the pair of drive wheels, and a fluid recirculation system provides for temperature control and use of a plurality of processing fluids.

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