Mechanical-quantity measuring device

Details Mechanical-quantity measuring device Mechanical-quantity measuring device

2011-08-09

2011-08-09

Caputo, Lisa M (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S775000

Reexamination Certificate

active

07992448

ABSTRACT:
A mechanical-quantity measuring device capable of measuring a strain component in a specific direction with high precision is provided.At least two or more pairs of bridge circuits are formed inside a semiconductor monocrystal substrate and a semiconductor chip, and one of these bridge circuits forms a n-type diffusion resistor in which a direction of a current flow and measuring variation of a resistor value are in parallel with a <100> direction of the semiconductor monocrystal silicon substrate, and an another bridge circuit is composed of combination of p-type diffusion resistors in parallel with a <110> direction.

REFERENCES:
patent: 4246908 (1981-01-01), Inagaki et al.
patent: 4576052 (1986-03-01), Sugiyama
patent: 2006/0043508 (2006-03-01), Ohta et al.
patent: 56-060066 (1981-05-01), None
patent: 07-270109 (1995-10-01), None
patent: 10-213503 (1998-08-01), None
patent: 2001-304997 (2001-10-01), None
patent: 2005-114443 (2005-04-01), None
Japan Patent Office office action for patent application JP2006-089834 (Jun. 17, 2010).
European Search Report for application EP07003454.1 (Sep. 29, 2010).

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