Measuring method for ellipsometric parameter and ellipsometer

Details Measuring method for ellipsometric parameter and ellipsometer Measuring method for ellipsometric parameter and ellipsometer

1991-12-31

1994-05-10

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356367, G01B 1106

Patent

active

053112857

ABSTRACT:
Movable optical parts included in an ellipsometer are removed to increase the measurement speed, and a specific quadrant to which a phase difference .DELTA. as an ellipsometric parameter belongs is determined by one measuring operation. A beam is radiated from a light source section onto a measurement target, and the reflected beam having an elliptically polarized beam, which is reflected by the target, is divided into four different polarized light components. The optical intensities of the respective light components are then detected. Ellipsometric parameters .psi. and .DELTA. are calculated on the basis of the detected four optical intensities. In addition, the above-mentioned four different polarized light components are obtained by using a wave plate. Furthermore, the polarization directions of the four polarized light components whose optical intensities are obtained are respectively set at angles -45.degree., +45.degree., 90.degree., and 0.degree. with respect to a reference direction. Alternatively, a composite beam splitter is used to obtain four polarized light components.

REFERENCES:
patent: 3556662 (1971-01-01), Levenstein et al.
patent: 4850711 (1989-07-01), Sano et al.
patent: 4872758 (1989-10-01), Miyazaki et al.
patent: 5073025 (1991-12-01), Brooks
patent: 5102222 (1992-04-01), Berger et al.
Dill et al, "Ellipsometry with pulsed tunable laser sources", IBM Technical Disclosure Bulletin, vol. 19, No. 4 (Sep. 1976) pp. 1487-1489.
Extended Abstracts (The 52nd Autumn Meeting, 1991); The Japan Society of Applied Physics, No. 3, p. 844.
The Review of Scientific Instruments, vol. 42, No. 1, Jan. 1971, pp. 19-22.

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