Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-04-17
1991-12-17
Simmons, David A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156633, 156655, 1566591, 156660, 156662, H01L 2100
Patent
active
050732307
ABSTRACT:
Means and methods for obtaining the separation of large area semiconductor pitaxial device layers from the substrates on which they are grown, the transfer of the grown epi layers to a new host substrate for mounted alignment with features of the new host, and reuse of the original substrate.
REFERENCES:
patent: 4738746 (1988-04-01), Clarion
patent: 4883561 (1989-11-01), Gmitter et al.
Gerber Donald S.
Maracas George N.
Ruechner Ronald A.
Arizona Board of Regents acting on behalf of Arizona State Unive
Dang Thi
Mybeck Richard R.
Simmons David A.
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