Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate
2006-05-30
2010-12-28
Nguyen, Kiet T (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
C250S299000, C250S283000, C250S281000
Reexamination Certificate
active
07858937
ABSTRACT:
A sample S is irradiated with a two-dimensionally spread ray of laser light to simultaneously ionize substances within a two-dimensional area on the sample. The resultant ions are mass-separated by a TOF mass separator4without changing the interrelationship of the emission points of the ions. The separated ions are then directed to a two-dimensional detector section7through a deflection electric field created by deflection electrodes61and62. The two-dimensional detector section7consists of a plurality of detection units7aarranged in parallel, each unit including an MCP8a, fluorescent plate9aand two-dimensional array detector10a. The magnitude of deflecting the flight path of the ions by the deflection electric field is changed in a stepwise manner with the lapse of time from the generation of the ions so that a plurality of mass analysis images are sequentially projected on each detection unit7. When the mass analysis image shifts from one detection unit to another, the data acquisition operation by the two-dimensional array detector in the previous detection unit is discontinued. As a result, a predetermined number of the latest images are held inside the detector. Thus, the measurement time can be extended to widen the measurable mass-to-charge ratio range, while ensuring a high mass resolution.
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Etoh Takeharu
Ogawa Kiyoshi
Kinki University
Nguyen Kiet T
Shimadzu Corporation
Sughrue & Mion, PLLC
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