Mask set for microarray, method of fabricating mask set, and...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

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C700S120000, C700S121000, C430S005000, C378S035000

Reexamination Certificate

active

07844940

ABSTRACT:
A mask set with a light-transmitting region of a controlled size includes a plurality of masks for performing in-situ synthesis on probes of a microarray, wherein each mask includes a light-transmitting region and a light-blocking region, and the size of the light-transmitting region is equal to or greater than about 5% of the total size of the light-transmitting and light-blocking regions.

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International Search Report for EP 08 00 2181, Jun. 12, 2008.

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