Mask inspecting apparatus

Details Mask inspecting apparatus Mask inspecting apparatus

1988-02-12

1989-09-26

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

340721, 340723, 340732, 382 61, G06K 900, G09G 116

Patent

active

048706930

ABSTRACT:
A pattern forming apparatus for inverting at least one of plural patterns according to numerical design data respectively representing the plural patterns and synthesizing thus inverted pattern with the remainder of the plural patterns, comprises first operation device for attaching a flag of a positive image to the design data of uninverted patterns, and attaching a flag of an inverted image to the design data of inverted patterns, second operation device for handling the entire area of either inverted patterns or uninverted ones among the plural patterns as a single pattern, and attaching a corresponding flag to the design data of the pattern, and image forming device for forming image data of the area according to the data of the second operation device and then forming image data of each pattern according to the data of the first operation device.

REFERENCES:
patent: 4295135 (1981-10-01), Sukonick
patent: 4692758 (1987-09-01), Fawcett et al.

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