Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2007-08-14
2007-08-14
Whitehead, Jr., Carl (Department: 2813)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S030000, C438S745000, C257S059000, C257S072000, C349S043000, C349S139000
Reexamination Certificate
active
10814186
ABSTRACT:
A manufacturing method of a thin film transistor of a liquid crystal display device using 3-mask includes forming a gate electrode over a substrate, consecutively forming a gate insulating layer and an active layer, forming a first photoresist pattern, removing an active layer formed at a source/drain region, ashing the first photoresist pattern to expose a part of an active region, forming a source/drain electrode, forming a passivation layer, forming a second photoresist pattern that exposes a pixel region over the passivation layer; forming a pixel region by using the second photoresist pattern as a mask, side-etching a part of the passivation layer to expose a part of the drain electrode, forming a pixel electrode material over the second photoresist pattern and the pixel region, and simultaneously removing the second photoresist pattern and the pixel electrode material formed thereon to form a pixel electrode.
REFERENCES:
patent: 3994793 (1976-11-01), Harvilchuck et al.
patent: 5550071 (1996-08-01), Ryou
patent: 6004874 (1999-12-01), Cleeves
patent: 6274400 (2001-08-01), Jen
patent: 6545293 (2003-04-01), Wong
patent: 2004/0125327 (2004-07-01), Choi et al.
patent: 2004/0129943 (2004-07-01), Yoo et al.
patent: 2004/0233361 (2004-11-01), Ha et al.
Chang Youn-Gyoung
Cho Heung-Lyul
Yoo Soon-Sung
Birch & Stewart Kolasch & Birch, LLP
Jr. Carl Whitehead
LG.Philips LCD Co. , Ltd.
Rodgers Colleen E.
LandOfFree
Manufacturing method of liquid crystal display device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Manufacturing method of liquid crystal display device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturing method of liquid crystal display device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3881552