Manufacturing method for a trench capacitor having an...

Details Manufacturing method for a trench capacitor having an... Manufacturing method for a trench capacitor having an...

2007-12-25

2007-12-25

Landau, Matthew C. (Department: 2815)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S244000, C438S386000, C438S387000, C257SE21651

Reexamination Certificate

active

11115391

ABSTRACT:
The present invention relates to a manufacturing method for a trench capacitor having an isolation collar which is electrically connected with a substrate on a single side via a buried contact. More specifically, the present invention relates to manufacturing method for a trench capacitor having an isolation collar with a metal conductive fill in the collar region connected to a metal fill in the capacitor region.

REFERENCES:
patent: 6828192 (2004-12-01), Gustin et al.
patent: 6905897 (2005-06-01), Hsu
patent: 7170125 (2007-01-01), Seidl et al.
patent: 2005/0020024 (2005-01-01), Goldbach
patent: 2005/0026384 (2005-02-01), Kudelka et al.
patent: 2005/0106831 (2005-05-01), Hsu et al.
patent: 2005/0153507 (2005-07-01), Hecht et al.

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