Manual control with force-feedback for probe...

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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Reexamination Certificate

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07013717

ABSTRACT:
A probe microscope includes a probe and a scanner, the scanner generating relative motion between a probe and a sample. In addition, a manual input device is provided to control a separation between a sample and a probe. The detector is used to generate a signal related to movement of the probe (for example, deflection). Moreover, the microscope has an alerting device that is responsive to the signal to provide feedback to an operator, the feedback being indicative of interaction between the sample and the probe. Preferably, the manual input device is a rotatable knob. Also, the alerting device is preferably a mechanical resistance device coupled to the knob to provide the feedback to the user.

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