4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal

Efim Vinnitsky

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Electrical feed-through structure and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Managing work-piece deflection

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2883474

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