Management system for semiconductor manufacturing equipment

Details Management system for semiconductor manufacturing equipment Management system for semiconductor manufacturing equipment

2008-01-15

2008-01-15

Bahta, Kidest (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S115000, C700S121000, C700S215000, C700S228000, C700S229000, C340S572100, C340S870030

Reexamination Certificate

active

07319912

ABSTRACT:
A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette. The tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.

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“ZigBee Alliance—Markets & Solutions”, ZigBee Alliance, http://www.zigbee.org/en/markets/index.asp.

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