Magneto-optical photoresist

Details Magneto-optical photoresist Magneto-optical photoresist

2011-08-02

2011-08-02

Chacko-Davis, Daborah (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

C430S320000, C029S603130, C216S022000, C216S042000

Reexamination Certificate

active

07989152

ABSTRACT:
A method for a magneto-optical photoresist. The method includes applying a magneto-optical photoresist to a surface, and patterning the magneto-optical photoresist by using a magnetic alignment. The magneto-optical photoresist is also patterned by using a photo exposure, wherein the magnetic alignment provides a photo exposure alignment for the photo exposure.

REFERENCES:
patent: WO 2005/065303 (2005-07-01), None
Sensors and Actuators A, 128, Jan. 7, 2006, pp. 43-51, “A Study on the Development of a Continuous Peristaltic Micropump using Magnetic fluids”, Eui-Gyu Kim et al.

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