Magnetic tunnel junction structures and methods of fabrication

Static information storage and retrieval – Systems using particular element – Magnetoresistive

Reexamination Certificate

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C257SE21665

Reexamination Certificate

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06952364

ABSTRACT:
A method for forming an MTJ structure suitable for use in a MRAM device having a bottom electrode including a layer of platinum, ruthenium, iridium, rhodium, osmium, palladium or their oxides and having reduced surface roughness to improve the hysteresis loop characteristics of the resulting MTJ structure. The bottom electrode layer may also combine the functions of both the seeding layer and bottom electrode of the conventional two-layer structure, thereby simplifying the manufacturing process.

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Jeong et al., “Fully Integrated 64Kb MRAM with Novel Reference Cell Scheme”, Electron Devices Meeting, 2002. IEDM '02. Digest. International, vol., Iss., 2002, pp.: 551-554.

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