Magnetic semiconductor wafers with handling apparatus and method

Details Magnetic semiconductor wafers with handling apparatus and method Magnetic semiconductor wafers with handling apparatus and method

1992-03-17

1993-07-06

Valenza, Joseph E.

Conveyors: power-driven

With means to facilitate working, treating, or inspecting...

Means engaging conveyor or load on a conveyor to align load...

198619, B65G 1564

Patent

active

052245810

ABSTRACT:
A semiconductor wafer is provided with magnetic material about the periphery for magnetically clamping the wafer on a seating gasket at the processing station. The seating gasket is annular for peripherally supporting the wafer. An electro-magnet establishes a peripheral station magnetic field which attracts the wafer magnetic material to form the clamp. The station magnetic field may by reversed to levitate the wafer onto and off of the seating gasket.

REFERENCES:
patent: 3571911 (1971-03-01), Littwin
patent: 3887996 (1975-06-01), Hartleroad et al.
patent: 3887997 (1975-06-01), Hartleroad et al.
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 4724222 (1988-02-01), Feldman
patent: 4771358 (1988-09-01), Millner

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