Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1998-10-02
2000-08-08
Diamond, Alan
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419232, 2041923, 20419234, 20419235, 427595, 427596, 216 63, 216 66, 216 67, 216 94, 216 42, 216 51, 216 49, 216 37, 216 11, 216 12, 430313, 430323, C23C 1446, B01J 1908
Patent
active
060996986
ABSTRACT:
It is an object of the present invention to provide a method of making a magnetic disk having a uniform textured structure with micro-waviness of fabrication depth of less than 20 nm, preferably less than 10 nm, and a local depth deviation of less than 5%, in which texture patterns are characterized by the fact that lateral surfaces of the structure are sloped or curved. The object has been achieved in a method for making a magnetic disk having micro-waviness on a fabrication surface of a substrate for reducing dynamic friction and controlling head float, by rotating and irradiating the fabrication surface with a high energy beam from a beam source at an inclined angle to the substrate surface, through a shielding mask having a specific pattern, so as to process a transcription pattern on the substrate surface to produce a textured structure with micro-waviness having sloped or curved side surfaces.
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Hosaka et al, J. Vac. Sci. Technol., 15(5), pp. 1712-1717, Sep. 1978.
Pending U.S. Pat. application Ser. No. 09/165,637 filed Oct. 2, 1998, Masahiro Hatakeyama et al., entitled "Magnetic Recording Disk and Method of Manufacturing Same".
Hatakeyama Masahiro
Ichiki Katsunori
Ishiguro Juichi
Kunitomo Shinta
Satake Tohru
Diamond Alan
Ebara Corporation
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