Abrading – Abrading process – Glass or stone abrading
Patent
1997-09-19
1999-11-23
Rose, Robert A.
Abrading
Abrading process
Glass or stone abrading
451288, 451364, 451388, 451494, 451285, B24B 100
Patent
active
059891033
ABSTRACT:
A carrier head assembly including a drive shaft and a system flange connectable to the drive shaft where the system flange includes a number of magnetic plates. The carrier head assembly also includes a carrier head flange. The carrier head flange has more magnetic plates, these magnetic plates generally facing the previous plates. The magnetic plates magnetically engage to couple the carrier head flange to the system flange.
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Birang Manoocher
Nystrom James
Prince John
Applied Materials Inc.
Nguyen George
Rose Robert A.
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