4. Chucks or sockets
  5. With fluid-pressure actuator
  6. Socket type

Hirosuke Ooshio

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Electrostatic chuck

Chucks or sockets – With fluid-pressure actuator – Socket type
Patent

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Magnet driving method and device for same

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-222886

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