Low voltage superjunction MOSFET

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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Details

C438S279000

Reexamination Certificate

active

07410851

ABSTRACT:
A power semiconductor switching device such as a power MOSFET that includes breakdown voltage enhancement regions formed by self-alignment.

REFERENCES:
patent: 6096606 (2000-08-01), Merchant
patent: 6380569 (2002-04-01), Chang et al.
patent: 06163906 (1994-06-01), None
patent: 0982965 (1997-03-01), None
patent: WO 00/74141 (2000-12-01), None
European Search Report issued by the European Patent Office in EP Application No. 02748066 on Feb. 28, 2008.

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