Low voltage MOSFET

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257342, 257343, 257401, H01L 2976

Patent

active

061147265

ABSTRACT:
A low voltage planar MOSFET has a polyline width of less than 3.8 microns and a channel (base) region depth of less than 1.5 microns to produce a device having a reduced figure of merit (or product of Q.sub.GD and R.sub.DSON).

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patent: 5436481 (1995-07-01), Egawa
patent: 5460985 (1995-10-01), Tokura et al.
patent: 5494843 (1996-02-01), Huang
patent: 5677218 (1997-10-01), Tseng
1 micron Micron VLSI Technologypart II-Device Designs and Characteristics for High Performance Logic Applications, IEEE Journal of Solid-State Circuits, vol. Sc- 14, No. 2, Apr. 1979.
1 .mu.m MOSFET VLSI Technology: Part II-Device Designs and Characteristics for High-Performance Logic Applications, IEEE Journal of Solid-State Circuits, vol. SC-14, No. 2 (Apr. 1979).

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