Low voltage junction and high voltage junction optimization for

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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438976, 438275, 438258, 438266, H01L 21336, H01L 218234

Patent

active

061597953

ABSTRACT:
An intermediate implant step is performed to optimize the performance of the transistors in the peripheral portion of a floating gate type memory integrated circuit. The polysilicon layer (Poly 1) that forms the floating gate in the respective floating gate type memory devices prevents penetration of the optimizing implant into the core region in which the floating gate memory devices are formed. This permits the optimization implant to be performed without the need for an additional mask, thus reducing costs and production time.

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