Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Reexamination Certificate
2006-05-12
2008-12-02
Nguyen, Kiet T (Department: 2881)
Radiant energy
Invisible radiant energy responsive electric signalling
Ultraviolet light responsive means
Reexamination Certificate
active
07459690
ABSTRACT:
A radiation sensor for use with a lithographic apparatus is disclosed, the radiation sensor comprising a radiation-sensitive material which converts incident radiation of wavelength λ1into secondary radiation; and sensing means capable of detecting the secondary radiation emerging from said layer.
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Banine Vadim Yevgenyevich
Keur Wilhelmus Cornelis
Kroon Mark
Loopstra Erik Roelof
Moors Johannes Hubertus Josephina
ASML Netherlands B.V.
Nguyen Kiet T
Pillsbury Winthrop Shaw & Pittman LLP
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