4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Pieter Willem Herman de Jager

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Apparatus and method for inspecting circuit structures

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2184674

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