Gas separation: processes – Degasification of liquid
Reexamination Certificate
2007-10-16
2007-10-16
Lawrence, Frank M. (Department: 1724)
Gas separation: processes
Degasification of liquid
Reexamination Certificate
active
10966803
ABSTRACT:
This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis acidity, particularly hazardous specialty gases such as BF3and diborane, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis basicity capable of effecting a reversible reaction between a gas having Lewis acidity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
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Brzozowski Jeffrey Richard
Henderson Philip Bruce
Pearlstein Ronald Martin
Tempel Daniel Joseph
Air Products and Chemicals Inc.
Chase Geoffrey L.
Lawrence Frank M.
Yang Lina
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