Liquid isolation of contact rings

Details Liquid isolation of contact rings Liquid isolation of contact rings

2006-11-21

2006-11-21

Bell, Bruce F. (Department: 1746)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S22400M, C204S287000, C204S288300, C204S297010, C204S297060, C204S297080, C204S297090, C204S297100, C204S297140

Reexamination Certificate

active

07138039

ABSTRACT:
Embodiments of the invention may further provide a contact ring for an electrochemical plating system. The contact generally includes a substrate receiving member having a substrate support surface formed thereon, a plurality of electrical contact pins extending from the substrate support surface, a first seal positioned on the substrate support surface radially inward of the plurality of electrical contacts, and a second seal positioned radially outward of the plurality of electrical contacts. Additionally, the contact ring generally includes a fluid inlet configured to supply a fluid to a volume between the first seal and the second seal.

REFERENCES:
patent: 3649509 (1972-03-01), Morawetz et al.
patent: 3727620 (1973-04-01), Orr
patent: 3770598 (1973-11-01), Creutz
patent: 4027686 (1977-06-01), Shortes et al.
patent: 4092176 (1978-05-01), Kozai et al.
patent: 4110176 (1978-08-01), Creutz et al.
patent: 4113492 (1978-09-01), Sato et al.
patent: 4304641 (1981-12-01), Grandia et al.
patent: 4315059 (1982-02-01), Raistrick et al.
patent: 4326940 (1982-04-01), Eckles et al.
patent: 4336114 (1982-06-01), Mayer et al.
patent: 4376685 (1983-03-01), Watson
patent: 4405416 (1983-09-01), Raistrick et al.
patent: 4428815 (1984-01-01), Powell et al.
patent: 4435266 (1984-03-01), Johnston
patent: 4489740 (1984-12-01), Rattan et al.
patent: 4510176 (1985-04-01), Cuthbert et al.
patent: 4518678 (1985-05-01), Allen
patent: 4519846 (1985-05-01), Aigo
patent: 4693805 (1987-09-01), Quazi
patent: 4732785 (1988-03-01), Brewer
patent: 4789445 (1988-12-01), Goffman et al.
patent: 5039381 (1991-08-01), Mullarkey
patent: 5055425 (1991-10-01), Leibovitz et al.
patent: 5092975 (1992-03-01), Yamamura et al.
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5162260 (1992-11-01), Leibovitz et al.
patent: 5222310 (1993-06-01), Thompson et al.
patent: 5224504 (1993-07-01), Thompson et al.
patent: 5230743 (1993-07-01), Thompson et al.
patent: 5252807 (1993-10-01), Chizinsky
patent: 5377708 (1995-01-01), Bergman et al.
patent: 5429733 (1995-07-01), Ishida
patent: 5447615 (1995-09-01), Ishida
patent: 5516412 (1996-05-01), Andricacos et al.
patent: 5608943 (1997-03-01), Konishi et al.
patent: 5625170 (1997-04-01), Poris
patent: 5705223 (1998-01-01), Bunkofske
patent: 5718813 (1998-02-01), Drummond et al.
patent: 5723028 (1998-03-01), Poris
patent: 5985126 (1999-11-01), Bleck et al.
patent: 6001234 (1999-12-01), Batz, Jr. et al.
patent: 6004440 (1999-12-01), Hanson et al.
patent: 6004828 (1999-12-01), Hanson
patent: 6080291 (2000-06-01), Woodruff et al.
patent: 6090291 (2000-07-01), Akai et al.
patent: 6103085 (2000-08-01), Woo et al.
patent: 6103628 (2000-08-01), Talieh
patent: 6139703 (2000-10-01), Hanson et al.
patent: 6139712 (2000-10-01), Patton et al.
patent: 6159354 (2000-12-01), Contolini et al.
patent: 6176992 (2001-01-01), Talieh
patent: 6193859 (2001-02-01), Contolini et al.
patent: 6207572 (2001-03-01), Talieh
patent: 6248222 (2001-06-01), Wang
patent: 6251050 (2001-06-01), Johnston
patent: 6251235 (2001-06-01), Talieh et al.
patent: 6270647 (2001-08-01), Graham et al.
patent: 6274010 (2001-08-01), Henington et al.
patent: 6274013 (2001-08-01), Bleck et al.
patent: 6309524 (2001-10-01), Woodruff et al.
patent: 6328872 (2001-12-01), Talieh et al.
patent: 6352623 (2002-03-01), Volodarsky et al.
patent: 6355153 (2002-03-01), Uzoh et al.
patent: 6358388 (2002-03-01), Bleck et al.
patent: 6402925 (2002-06-01), Talieh
patent: 6409904 (2002-06-01), Uzoh et al.
patent: 6413388 (2002-07-01), Uzoh et al.
patent: 6413403 (2002-07-01), Lindquist et al.
patent: 6464571 (2002-10-01), Talieh et al.
patent: 6468139 (2002-10-01), Talieh et al.
patent: 6471847 (2002-10-01), Talieh et al.
patent: 6478936 (2002-11-01), Volodarsky et al.
patent: 6479159 (2002-11-01), Bruening et al.
patent: 6482307 (2002-11-01), Ashjaee et al.
patent: 6497800 (2002-12-01), Talieh et al.
patent: 6514258 (2003-02-01), Brown et al.
patent: 6534116 (2003-03-01), Basol
patent: 6540899 (2003-04-01), Keigler
patent: 58182823 (1983-10-01), None
patent: 63118093 (1988-05-01), None
patent: 4131395 (1992-05-01), None
patent: 4280993 (1992-10-01), None
patent: 6-17291 (1994-01-01), None
patent: 97/12079 (1997-04-01), None
patent: 99/25902 (1999-05-01), None
patent: 99/25903 (1999-05-01), None
patent: 99/25904 (1999-05-01), None
patent: 99/25905 (1999-05-01), None
patent: 99/26275 (1999-05-01), None
Colombo, “Wafer Back Surface Film Removal,” Central R&D, SGS-Thomson Microelectronics, Agate Italy, no month/ yr available.
Semitool Product Catalog (on-line) Oct. 27, 1998.
Singer, “Copper Has Enormous Benefits When Compared to Aluminum, but its Implementation Requires Some Fundamental Changes in Process Technologies,” Semiconductor International Jun. 1998.
Singer, “Wafer Processing,” Semiconductor International Jun. 1998.
Pitney, “Ney Contact Manual” Oct. 1974.

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