Liquid impingement cooling module for semiconductor devices

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With provision for cooling the housing or its contents

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257715, 257721, 361689, 361699, 174 151, 165 804, 16510433, H01L 2302, H01L 2504

Patent

active

052705722

ABSTRACT:
A semiconductor cooling unit for directly jetting a cooling medium against surfaces of semiconductor devices for use in a high-speed computer or the like to effectively remove heat from the semiconductor devices, in which partition members for partitioning a space into regions where semiconductor devices are placed. Each partitioned region has an opening at its ceiling side, and a pipe for supplying or discharging the cooling medium through the opening is disposed so as to project toward a central portion of the back surface of each semiconductor device. This pipe is utilized to also section a cooling medium supply header or a cooling medium return header so that bubbles generated from the semiconductor device surfaces can be smoothly removed, and so that the cooling medium can flow smoothly onto the semiconductor devices.

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A. H. Johnson `Diaphragm Cooling for Devices`, IBM Tech. Dis. Bull., vol. 20 No. 8, Jan. 1978 p. 3121.
Heat Transfer in Electronics, 1989 ASME Htd vol. 111, pp. 79-87.

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