Liquid deposition methods of fabricating layered superlattice ma

Details Liquid deposition methods of fabricating layered superlattice ma Liquid deposition methods of fabricating layered superlattice ma

1995-06-07

2000-05-02

Bell, Janyce

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427226, 427229, 4271263, 427252, 427554, 427421, 427560, 427294, 20419216, B05D 512

Patent

active

060569948

ABSTRACT:
A precursor liquid comprising several metal 2-ethylhexanoates, such as strontium, tantalum, and bismuth 2-ethylhexanoates, in a xylenes/methyl ethyl ketone solvent is prepared, and deposited on a substrate. In one embodiement the substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit the precursor liquid on the substrate. In another embodiment, the precursor is spin-coated on the substrate. The liquid is dried, baked, and annealed to form a thin film of a layered superlattice material, such as strontium bismuth tantalate, on the substrate.

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