Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent
1997-01-24
1998-06-30
Font, Frank G.
Optics: measuring and testing
By configuration comparison
With comparison to master, desired shape, or reference voltage
356359, G01B 1100
Patent
active
057742243
ABSTRACT:
Microscopic apparatus for inspecting electronic circuit chips includes an illumination source directing light at a chip at an oblique angle with respect to a normal plane perpendicular to its surface. To take advantage of specular reflection, a lens is arranged to view the chip also at an oblique angle, placing an image of a strip of the circuit chip on a linear CCD. Movement of the circuit chip in a scanning direction causes the image to flow across the circuit chip in a transverse direction, allowing a two-dimensional data pattern to be formed with data from successive operations reading data from the CCD.
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J. C. Chastang, "Oblique Viewing Attachment for Microscope," Proceedings of SPIE, vol. 399, 1983, pp. 239-245.
Davidge Ronald V.
Font Frank G.
International Business Machines - Corporation
Kim Robert
Tomlin Richard A.
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