Line width control in a radiation sensitive polyimide

Details Line width control in a radiation sensitive polyimide Line width control in a radiation sensitive polyimide

1992-06-18

1994-04-05

Kight, III, John

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

430327, 430328, 430330, 430 4, 430 5, G03C 500

Patent

active

053004035

ABSTRACT:
Standard processing techniques for creating a patterned polyimide film from a radiation sensitive polyimide film forming composition are modified to include a post-develop, flood exposure/hardening step which crosslinks precursors of the polyimide film prior to curing. The flood exposure/hardening step prevents pull-back of the wall profile which occurs during the shrinkage of radiation sensitive polyimide film forming composition which occurs during thermal curing.

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John C. Matthews et al., Stabilization of single layer and multilayer resist patterns to aluminum etching environments, SPIE Conference, Mar. 1984.

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