Lens system for a photo ion spectrometer

Details Lens system for a photo ion spectrometer Lens system for a photo ion spectrometer

1987-05-04

1990-11-27

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250305, H01J 4944, H01J 4906

Patent

active

049738429

ABSTRACT:
A lens system in a photo ion spectrometer for manipulating a primary ion beam and ionized atomic component. The atomic components are removed from a sample by a primary ion beam using the lens system, and the ions are extracted for analysis. The lens system further includes ionization resistant coatings for protecting the lens system.

REFERENCES:
patent: 3845305 (1974-10-01), Liebl
patent: 4100409 (1978-07-01), Brongersma
patent: 4350925 (1982-09-01), Marschka
patent: 4370594 (1983-01-01), Kuzenetzoff
patent: 4442354 (1984-04-01), Hurst et al.
patent: 4633084 (1986-12-01), Gruen et al.
patent: 4658137 (1987-04-01), Garth et al.
patent: 4733073 (1988-03-01), Becker et al.

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