4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron microscope type

Novelx, Inc.

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Layered electron beam column and method of use thereof

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Stacked lens structure and method of use thereof for...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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