Laterally double-diffused metal oxide semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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C257S335000, C257S336000, C257SE29258

Reexamination Certificate

active

07829408

ABSTRACT:
The present invention discloses a laterally double-diffused metal oxide semiconductor transistor (LDMOS) and a method for fabricating the same. The LDMOS includes a substrate, a first well, a drain, a second well and a source. The substrate includes a first conductive dopant. The first well includes a second conductive dopant and formed in a part of the substrate, and the drain is located in the first well. The second well includes the first conductive dopant and formed in another part of the substrate, and the source located in the second well. The source includes a lightly doped region and a heavily doped region extending downwardly from a top surface of the substrate. The depth of the lightly doped region is more than the depth of the heavily doped region.

REFERENCES:
patent: 6794722 (2004-09-01), Fujita
patent: 7087973 (2006-08-01), Mallikarjunaswamy et al.
patent: 2002/0053695 (2002-05-01), Liaw et al.
patent: 2005/0067662 (2005-03-01), Lee et al.
patent: 2006/0001086 (2006-01-01), Pendharkar
patent: 2007/0034944 (2007-02-01), Xu et al.

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