Laser gas supply path structure in an exposure apparatus

Details Laser gas supply path structure in an exposure apparatus Laser gas supply path structure in an exposure apparatus

2005-01-25

2005-01-25

Porta, David (Department: 2878)

Coherent light generators

Particular active media

Gas

C372S057000, C372S061000, C372S090000, C355S053000, C355S067000

Reexamination Certificate

active

06847672

ABSTRACT:
A gas supply path structure forms a fluid path for allowing a laser gas to flow into or out of a pair of fluid inlet and outlet11aand a laser gas is controlled to a predetermined subsonic speed at a throat portion. Gas supplies for controlling the speed of the gas are connected each to the fluid inlet and to the fluid outlet of the gas supply path structure and, together with a cooling device, compose a circulation system for controlling the speed and pressure of the laser gas at the fluid inlet and/or at the fluid outlet.

REFERENCES:
patent: 4005374 (1977-01-01), Levatter et al.
patent: 4200819 (1980-04-01), Haslund
patent: 4317087 (1982-02-01), Sander et al.
patent: 4319201 (1982-03-01), Bush et al.
patent: 4413345 (1983-11-01), Altmann
patent: 4911805 (1990-03-01), Ando et al.
patent: 5050181 (1991-09-01), Gekat
patent: 5206876 (1993-04-01), von Buelow et al.
patent: 5381210 (1995-01-01), Hagiwara
patent: 5698036 (1997-12-01), Ishii et al.
patent: 5781579 (1998-07-01), Choo et al.
patent: 6198762 (2001-03-01), Krasnov
patent: 6212211 (2001-04-01), Azzola et al.
patent: 0 820 132 (1998-01-01), None

Affiliated with

Also associated with

Rating

Laser gas supply path structure in an exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser gas supply path structure in an exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser gas supply path structure in an exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3393274