Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1990-05-30
1992-08-04
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356125, 356445, G01B 1130
Patent
active
051353075
ABSTRACT:
A laser system for measuring dimensional aberrations across a target surface includes a laser diode for producing a diverging beam of laser emission. A mask spaced from the diode in the beam has an aperture therein and can be moved so as to translate the aperture to selected locations laterally with respect to the beam. The mask blocks emission from impinging on the target except for emission transitting the aperture. Emission reflected from a segment to the target returns through the aperture back into the laser diode. An AC current is added to the driver current to modulate the emission. A lock-in amplifier of a photodetector signal adds feedback current to the driver current to lock in phase angle, so that the feedback current is a measure of the aberrations.
REFERENCES:
"Laser Diode Feedback Interferometer for Stabilization and Displacement Measurements" by T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee and T. C. Strand, Applied Optics 26, 892 (1989).
de Groot Peter J.
Gallatin Gregg M.
Gardopee George
Denson-Law W. K.
Hays R. A.
Hughes Danbury Optical System, Inc.
Keesee, II LaCharles P.
Streeter W. J.
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