Laser deposition of crystalline boron nitride films

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156610, 156612, 156DIG80, 156DIG86, 156DIG99, 20415741, 423290, 427 42, 427 531, 427255, C30B 2306, C23C 1634, C01B 21064

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051395916

ABSTRACT:
Thin films of boron nitride are grown on single crystal silicon substrates using laser deposition techniques. The films are characterized by essentially a single crystal throughout and having a cubic structure which is in epitaxial registry with the underlying silicon substrate.

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